ORlON-40T ANTI-REFLECTIVE COATING SYSTEM

ORlON-40T ANTI-REFLECTIVE COATING SYSTEM

  • Pumping System T-1600 Turbo Molecular Pump (LEYBOLD, Germany), Rotary vane pump model E2m40 (EDWARDS, UK), CRYO-6 Water Vapor Cryo pump
  • Evaporation Source: EB-Gun Max. Power 3KW, Crucible has 6 pockets of 4cc each. Thermal Evaporator (boat) Max. 100A, 6VAC
  • Ion Source: VTC-2, End-Hall type, Gas system for reactive gas included
  • Control System: Fully automatic PC control system with Real-time software.
  • Supported Ion Beam Assistance
  • Overall Dimensions (W x D x H mm) 1100 x 1600 x 1900
  • Chamber size, mm 600(D) x 800(H)
  • Substrate Holder, 3 segments Al Dome, or flip over system available.
  • Batch Capacity, approx. Lenses (dome) 40
  • Batch Capacity, lenses (flip over) 16
  • Average cycle time, 40 min

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