ORlON-40T ANTI-REFLECTIVE COATING SYSTEM
- Pumping System T-1600 Turbo Molecular Pump (LEYBOLD, Germany), Rotary vane pump model E2m40 (EDWARDS, UK), CRYO-6 Water Vapor Cryo pump
- Evaporation Source: EB-Gun Max. Power 3KW, Crucible has 6 pockets of 4cc each. Thermal Evaporator (boat) Max. 100A, 6VAC
- Ion Source: VTC-2, End-Hall type, Gas system for reactive gas included
- Control System: Fully automatic PC control system with Real-time software.
- Supported Ion Beam Assistance
- Overall Dimensions (W x D x H mm) 1100 x 1600 x 1900
- Chamber size, mm 600(D) x 800(H)
- Substrate Holder, 3 segments Al Dome, or flip over system available.
- Batch Capacity, approx. Lenses (dome) 40
- Batch Capacity, lenses (flip over) 16
- Average cycle time, 40 min
